ALD Precursor Assignments

ALD Cleanroom

 (Updated: November 1, 2016 - Bob Geil)


 Port#   

 Abbrev.

 Precursor

 Notes

 0

 H2O

 Distilled H2O

 H2O refilled October 2016

 1

 Ga

Bis(μ-dimethylamino) tetrakis(dimethylamino) digallium Boost installed

 2

Ti

  Tetrakis-dimethylamido-Ti (TDMA-Ti)

 

 3

Sn

 Tetrakis-dimethylamido-Sn (TDMA-Sn)

Requires O3

 4

 Ni

 Bis(N,N'-di-t-butylacetamidinato) nickel(II)

 New cylinder (July 2016).  Boost installed

 5

 O3

 





ALD 312

 (Updated: September 1, 2016 - Bob Geil)


 Port#   

Abbrev.

 Precursor name

 Notes

 0

 H2O

 Distilled H2O

 

 1

 Al

 Trimethylaluminum (TMA)

 

 2

 Zr

 Tetrakis-dimethylamido-zirconium (TDMA-Zr)

 

 3

Ti

 Tetrakis-dimethylamido-Ti (TDMA-Ti)

 

 4

Cu

Bis(dimethylamino-2-propoxy) Cu(II)

 

 5

 Hf

 Tetrakis-dimethylamido-Hf (TDMA-Hf)

 



Precursors in stock:
 Aluminum Trimethyl aluminum
 Copper Bis(dimethylamino-2-propoxy)copper(II) also called Cu(dmap)2  
 Gallium Bis(μ-dimethylamino) tetrakis(dimethylamino) digallium
 Halfnium tetrakis-dimethylamido-halfnium (TDMA-Hf)
 Nickel 
 Strontium 
 Tin Tetrakis-dimethylamido-tin (TDMA-Sn)
 Titanium Tetrakis-dimethylamido-titanium (TDMA-Ti)
 Tungsten 
 Zinc Diethyl zinc
 Zirconium Tetrakis-dimethylamido-zirconium (TDMA-Zr)