Projects‎ > ‎

Microelectronics and MEMS

List of Projects:
  • Silicon based MEMS sensor/actuator design using standard processes.

  • MEMS High frequency microresonator layout design and interfacing.

  • Modeling, simulation and optimization Microdevices.

  • Fabrication of MEMS sensors in clean room facilities.(Lithography, CVD, DRIE, etc...).

  • Design and modeling of polymer based biomedical devices (Microtweezers for cytomechanics applications).

  • Semiconductor electronics device fabrication.

  • Process development for custom shape deep etching of silicon.

  • Non-invasive drug delivery microdevice development.

Related Publications:

  • S. Hajhashemi, A. Amini and B. Bahreyni, "A micromechanical bandpass filter with adjustable pass band and bidirectional control of center frequency", Journal of sensors and actuators A .

  • A.Amini and B.Bahreyni, "Piezoelectric Strain Measurement for Low Power Microsensor Applications" ASME 2010 , Nov.2010, Vancouver, Canada.

  • S.Hajhashemi, A.Amini, B.Bahreyni, "Temperature-stable differential micro-resonators for timing application "ASME 2010 , Nov.2010, Vancouver, Canada.
  • S.Azimi, M.Mehran, A.Amini, A.Vali, S.Mohajerzadeh, M.Fahipour, "Formation of three-dimensional and nanowall structures on silicon using a hydrogen-assisted high aspect ratio etching" Journal of Vacuum Science and Technology B , vol.28, Issue.6 , pp.1125-1132

  • S.Azimi, J.Naghsh-Nilchi, A.Amini, A.Vali, M.Mehran and S.Mohajerzadeh “3-dimentional etching of silicon substrates using a modified deep reactive ion etching technique”, MME2010, Sep 2010, Enschede, The Netherlands.

  • S.Azimi, S.Mohajerzadeh, A.Amini, A.Vali., M.Mehran.Realization of Three-Dimensional Micro and Nano-Structures on Silicon Substrates , Journal of Scientia Iranica , Transaction F: Nanotechnology, Vol. 17, No. 2, pp. 113-121, December 2010