The NW4 is a load lock compatible platform that can host up to four MM3A-EM micromanipulators. It is designed to enable nanoprobing and failure analysis on large substrates while making use of the load lock in order to minimize cycle times and maximize chamber cleanliness.
The MM3A-EM micromanipulators are equipped with low-current, low-capacity measurement capability and are fully compatible to the Advanced Probing Tools hardware and software suite including the Live Contact Tester and Electron Beam Induced Current Imaging modules, among others.
A key advantage this platform yields is its compatibility with the PS8 Prober Shuttles. By combining this setup with a PS8, labs are fully equipped to address the entire range of nanoprobing and fault localization/isolation workflows from complete packages on large substrates all the way down to individual transistors at device level.
Platform dimensions 162 mm x 134 mm
Space for up to four MM3A-EM manipulators
Load Lock Compatible
Same Connector as Prober Shuttle
Low Current, Low Noise measurement
Current measurement limit 3 fA @ 1 Hz
Insulation leakage current 50 fA at 1 V
Signal conductor resistance 6.5 Ω
Maximum voltage 210 V
Maximum current 200 mA
Operating range: A = 240°, B = 240°, C = 12 mm
Resolution A: 7 nrad (0.35 nm)
Resolution B: 7 nrad (0.25 nm)
Resolution C: < 0.05 nm
Low drift: 1 nm/min
All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.
Easy to install and remove for a high degree of flexibility
Plug-and-play system with modular components
Interfacing solutions for most SEM/FIB instruments
Fast setup
Ample space for large samples
Pioneering cabling technology
Intuitive control interfaces and software
User-friendly and easy to learn
Quick and easy probe tip exchange
Compact, stand-alone electronics
Effortless work with multiple manipulators
Excellent stability
Low drift (1 nm/min)
Reliable operation (one year endurance test)
Virtually insusceptible to vibrations
Fast pre-positioning by hand
High operating velocity (up to 10 mm/sec)
Sub-nanometer resolution
No backlash or reversal play
Extensive working range
Coarse and fine displacement in one drive