NW4 Platform
Plug-in compatible with PS8 platforms - extends the range of sample sizes to 120 x 120 mm

Overview

• Platform dimensions 162 mm x 134 mm

• Space for up to four MM3A-EM manipulators

• Load Lock Compatible

• Same Connector as Prober Shuttle

• Low Current, Low Noise measurement

• Current measurement limit 3 fA @ 1 Hz

• Insulation leakage current 50 fA at 1 V

• Signal conductor resistance 6.5 Ω

• Maximum voltage 210 V

• Maximum current 200 mA

Three-axis micromanipulators

• Operating range: A = 240°, B = 240°, C = 12 mm

• Resolution A: 7 nrad (0.35 nm)

• Resolution B: 7 nrad (0.25 nm)

• Resolution C: < 0.05 nm

• Low drift: 1 nm/min

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.

Compact & flexible

• Easy to install and remove for a high degree of flexibility

• Plug-and-play system with modular components

• Interfacing solutions for most SEM/FIB instruments

• Fast setup

• Ample space for large samples

• Pioneering cabling technology

Clear & simple

• Intuitive control interfaces and software

• User-friendly and easy to learn

• Quick and easy probe tip exchange

• Compact, stand-alone electronics

• Effortless work with multiple manipulators

Robust & stable

• Excellent stability

• Low drift (1 nm/min)

• Reliable operation (one year endurance test)

• Virtually insusceptible to vibrations

• Fast pre-positioning by hand

Fast & precise

• High operating velocity (up to 10 mm/sec)

• Sub-nanometer resolution

• No backlash or reversal play

• Extensive working range

• Coarse and fine displacement in one drive