Sang-Min Kang

Semiconductor Device & Process Development Lab. (Academic Advisor: Jun-Young Park)

E-Mail : rkdtkdlas01@chungbuk.ac.kr

B.S. School of Electric Engineering, Chungbuk National University, Cheongju, Republic of Korea.

T.-H. Kil, J.-W. Yeon, H.-J. Park, M.-K. Lee, E.-C. Yun, M.-W. Kim, S.-M. Kang, and J.-Y. Park*, "Low-Temperature Deuterium Annealing for HfO2 /SiO2 Gate Dielectric in Silicon MOSFETs", IEEE J. Electron Devices Soc., vol. 12, no. 1, pp. 1030-1033, Dec. 2024. [ Website ]

S.-M. Kang, Y.-J. Choi, H.-J. Park, T.-H. Kil, J.-W. Yeon, M.-K. Lee, E.-C. Yun, M.-W. Kim, S.-J. Jeon, M.-S. Kim*, and J.-Y. Park*, "Study on Multiple Post-Metallization Annealing for Enhancing the Performance and Reliability of Silicon MOSFETs", Trans. Electr. Electron. Mater., vol. 38, no. 2, pp. 187–192, Mar. 2025. [ Website ]

박준영, 연주원, 길태현, 박효준, 최유진, 강상민, 지홍석, "박막의 표면 거칠기 및 균일성 개선을 위한 저온 중수소 어닐링 방법 및 이에 의하여 제조된반도체 소자", KR 10-2024-0053442. [ 출원 ]

Y.-J. Choi, S.-M. Kang, H.-J. Park, T.-H. Kil, J.-W. Yeon, H.-S. Jee, E.-C. Yun, M.-K. Lee, D. Sohn, D.-E. Bang, A.-Y. Kim, and J.-Y. Park, "Impact of Hydrogen Passivation after Deuterium Annealing in the Fabrication of Silicon MOSFETs", KIEEME Annual Summer Conference 2024, Jun. 2024.
T.-H. Kil, H.-J. Park, J.-W. Yeon, E.-C. Yun, M.-K. Lee, D. Sohn, H.-S. Jee, S.-M. Kang, A.-Y. Kim, Y.-J. Choi, D.-E. Bang, and J.-Y. Park, "Low-Temperature Deuterium Annealing for Enhanced Ionizing Radiation and Electrical Stress Immunity in MOSFETs", KIEEME Annual Summer Conference 2024, Jun. 2024.
E.-C. Yun, J.-W. Yeon, H.-J. Park, T.-H. Kil, M.-K. Lee, H.-S. Jee, D. Sohn, S.-M. Kang, A.-Y. Kim, Y.-J. Choi, D.-E. Bang, and J.-Y. Park, "Spacer-Less Trench Gate Nanosheet FET for Improved On-State Current and Simplified Fabrication Process", KIEEME Annual Summer Conference 2024, Jun. 2024.
H.-S. Jee, D. Sohn, J.-W. Yeon, H.-J. Park, T.-H. Kil, E.-C. Yun, M.-K. Lee, S.-M. Kang, A.-Y. Kim, Y.-J. Choi, D.-E. Bang, and J.-Y. Park, "Development of Physically Unclonable Function (PUF) using Multiple Process Variables", KIEEME Annual Summer Conference 2024, Jun. 2024.
D.-E. Bang, A.-Y. Kim, J.-W. Yeon, H.-J. Park, T.-H. Kil, M.-K. Lee, E.-C. Yun, D. Sohn, H.-S. Jee, S.-M. Kang, Y.-J. Choi, and J.-Y. Park, "Optimization of Doping Profile for Improved Performance of Nanosheet FET", KIEEME Annual Summer Conference 2024, Jun. 2024.