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LEO 1530-2 FESEM/EDS


photo of Leo 1530-2 FESEM

The LEO 1530 is a state-of-the-art scanning electron microscope (SEM) that uses a Schottky-type field-emission electron source. A beam booster is used to maintain optimum electron optical performance at all accelerating voltages. In addition, the patented Gemini optical column has no crossovers and utilizes a magnetic/electrostatic objective lens for outstanding imaging capabilities, especially at low voltage (due to reduced chromatic aberration).

  • Contact:
    Rick Noll
    noll@engr.wisc.edu
    608-263-366


Equipment


Secondary Electron Detectors (SE)

  • Conventional Everhart-Thornley detector in the chamber
  • In-lens detector, which utilizes secondary electrons, captured by the objective lens field providing excellent surface detail
Backscattered Electron Detector (BSE)
  • Optimized for low voltage operation
Energy Dispersive Analysis System (EDS)

  • Contains a state-of-the-art detector with a resolution of 129 eV at Manganese and a light element detection limit of Boron
Electron Backscattered Kikuchi Pattern Detector (EBKP)
  • Can collect patterns, analyze and store the data at the rate of one point every two seconds
  • Allows an array of 27,000 points to be analyzed in a typical 15 hour period

Performance Specifications

Superb image resolution

  • rated resolution is 1.2 nm at 20 kV
  • 2.5 nm at 5 kV
  • 40 nm at 1 kV
Designed to perform EDS analysis, BSE imaging and high resolution SE imaging

  • standard working distance of (8 mm)
  • allows up to 45° of tilt
EDS system has a state-of-the-art detector
  • resolution of 129 eV at manganese
  • a light element detection limit of boron