Photolithography Bay in NCF clean rooms.

UIC Engineering Research Facility
                          ERF Building on UIC Campus

The Nanotechnology Core Facility (NCF), located in the Engineering Research Facility (ERF) building on the University of Illinois at Chicago campus, is a versatile MEMS/Nano facility and is accessible to both academic non-profit and industrial researchers.

The NCF enables research by providing access, training, service and process guidance on fabrication and characterization equipment. As a research and development laboratory, NCF is dedicated to application of integrated circuit and fiber optic technology to improve manufacturing methods for MEMS/Nano devices, BioMEMS, Microfluidic, Electromechanical, Mechanical, Chemical, Optical, Photonic and multi-functional devices, some of which have previously been built by more traditional techniques.