2011Mar31 Meeting

HB-LED Equipment Automation TF Meeting
March 31, 2011
In conjunction with the North America Standards Spring 2011 Meetings (March 28-31)
SEMI Headquarters in San Jose, California

Meeting Summary
  • Automation Software                          
    • Equipment Data Acquisition Benefits– Lance Rist, RistTex
    • SECS/GEM vs. Interface A (EDA)– Brian Rubow, Cimetrix
    • SEMI Standards for automated MOCVD Tools – Karl Heinz, Aixtron
    • Group Discussion/Next Steps
  • Physical Interfaces Discussion
    • What components of the automation system MUST be standardized?
    • What are the critical features for each component?
    • Brainstorm Detailed list of critical features

Please contact Paul Trio (ptrio@semi.org) if you wish to participate in the Software WG and/or Hardware WG.

Paul Trio,
Apr 15, 2011, 10:01 AM