Charter:

• Define physical interfaces of substrate carriers used in HB-LED manufacturing.
• Define physical interfaces of process and metrology tools and of wafer / substrate carriers used in HB-LED manufacturing.
• This task force will sponsor forums to bring stakeholders together to define the wafer/substrate characteristics required for wafer/substrate handling wafers, substrate carriers, HB-LED process interactions, and metrology interfaces.

Scope:
This effort will require some initial discussions around a common vision for an HB-LED factory to which these standards shall apply. I don’t believe that a common Automation Vision should be a required output of this task force.  Although, the standards process would benefit greatly from any level of consensus in this area.

Carrier-related activities:
Start with 150 mm diameter wafers. Include:

• Shipping carriers –

• from wafer supplier to epi processor, and

• from epi processor to front-end HB-LED device fab

• Automation carriers –

• Process tool input and output
• Factory automation interfaces
• Robotic handling interfaces

• Process carriers

• Liquid, gaseous and vacuum environment

• Issues:

• Wafer diameter
• Wafer thickness
• Wafer flat
• Wafer Capacity.
• Wafer Bow > 1mm
• Slot pitch and related dimensions
• Equipment interface
• ID – Traceablity
• Contamination Control

Automation-related activities:
Start with 150 mm diameter wafers tools. Include shipping system, and physical interfaces for

• Process and Metrology Tools

• End Effectors
• Tool-to-carrier interfaces 

• Substrate Carriers

• Shipping carriers
•  from wafer supplier to epi processor, and
•  from epi processor to front-end HB-LED device fab
• Automation carriers
• Process tool input and output
• Factory automation interfaces
• Robotic handling interfaces
• - Process carriers
• Liquid, gaseous and vacuum environment

• Issues

• Wafer diameter, thickness
• Rectangular substrate dimensions
• Wafer/Substrate Capacity
• Wafer Bow > 1mm
• Slot pitch and related dimensions
• Equipment interface
• ID – Traceability
• Contamination Control

Leaders:

• Daniel Babbs (Brooks Automation)
• Jeff Felipe (Entegris)