Elastic Recoil Detection Analysis (ERDA)
When a MeV He ion beam incident on a sample with H and D, the H and D in the sample will be scattered in the forward direction. Spectrometry of these forward recoiled atoms gives rise to the quantitative depth profiling of these species in the sample. ERS provides a unique method for measuring the H and D content in thin films with detection limit ≥ 0.01 at.%. Because of the relatively small energy loss of H in solid, the depth resolution of this method is typically ~300-600Å. ERS is also called elastic recoil detection (ERD) or forward recoil spectrometry (FRS).