The link below contains a unit plan for the general topic of scanning probe microscopy. There is also a lesson plan for Atomic Force Microscopy. My intention is to use this in the senior year Physics course although I have used parts of it in sophomore Biology and I expect parts of it can present some concepts for freshman Physical Science. It is my intention to put together a lesson on the Scanning Tunneling microscope and it to this page.
I am thinking about a senior Physics project which would let the students build a model of the AFM. On the college level, this has been done at Drexel. Please see the attached document for the description of the project as it was done by Dr. Layton's engineering students.
Finally, I have attached a document intended to highlight the topics that should be covered in a curriculum that includes nanoscience. It is a work in progress in that I'll be updating it as I bring nanoscience into my school's curriculum.