Semiconducting Thin-film Engineering Lab
[STEL]
Schematic of ALD process
Atomic Layer Deposition Process for Future Electronics
ALD precursor design for phase-pure thin film deposition(Collaboration with KRICT)
Metal ALD for BEOL application
Low-temperature ALD process for Monolithic-3D structures and Flexible devices
Thin film materials ▼
Semiconducting layer
- n-type : SnO₂, ZnO, In₂O₃, ZnSnO, InGaSnO, InSnZnO, SnS₂, MoS₂, ReS₂, ITO
- p-type : SnO, Cu₂O, SnS, SnSe
Metal layer
- Pt, Ru, MoN, TaN, TiN,
Dielectric layer
- Alumina, Zirconia, Hafnia, Silicon oxide, Silicon nitride
Study on Interface/Surface Chemistry for Developing Sub-10 nm Scaled Devices
Atmospheric plasma ion deposition process for hydrophobic/hydrophilic surface structure control
Dielectric/Metal interface quantification technique (DRAM cap target)
Unideal interfacial layer reduction technqiue
Selective deposition & etching process
Capacitor structure in Hynix 1Gb DRAM
Transfer curve of IZTO TFT
CMOS thin films inverter fabricated
at low temperature (<240℃)
Vertical transistor
Thin Film Transistors and Inverters for Semiconductor/Display Applications
Oxide transistors for 4F2 DRAM, next-generation V-NAND Flash & Display backplane
CMOS Thin film inverters fabricated by Low-temperature ALD processes
Research on exploring next-generation channel layers such as chalcogenide thin films, metal chalcogenide thin films and organic-inorganic hybrid materials
Novel Deposition/Patterning Techniques for 2-D Materials
Crystal orientation-controlled growth of 2-D materials
Surface functional group engineering(SAM, Plasma, UVO, Flourocarbon) for atomic selective deposition technique
Atomic layer etching(ALE)
Cation-regulated transformation for the synthesis of well-oriented 2-D materials
Cation-regulated trasnformation process for SnS thin films
We are actively looking for highly motivated Graduate Students (M.S./Ph.D.) and Undergraduate Interns with various backgrounds (chemical engineering, materials science, physics, chemistry, electrical engineering etc.).
Please contact Prof. In-Hwan Baek (baek@inha.ac.kr) if you are interested in our research areas.
반도체 공정 및 소자연구, 특히 식각공정에 관심있는 학생분들은 인하대 백인환 교수에게 연락주세요.
