Microelectromechanical Systems Laboratory
at Suranaree University of Technology (SUT MEMS)
Research activities
Design and fabrication of:
- Microelectromechanical systems (MEMS)
- Micro devices based on synchrotron x-ray lithography
- Micro sensors, micro actuators
- Micro parts, micro machines
- Microfluidic devices
- Embedded systems
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"Development of CE microfluidic chips micromachining technique by powder blasting through LIGA hard masks", funded by the Synchrotron Light Research Institute, October 1, 2008 - September 30, 2009,
400,000 THB
- "Development of high precision plastic injection molds using LIGA-EDM technique",
funded by the Synchrotron Light Research Institute, October 1, 2008 - September 30, 2009,
400,000 THB
- "Development of capacitive pressure sensor using microelectromechanical systems technology",
funded by the Commission on Higher Education and Thailand Research Fund, December 1, 2006 - November 30, 2008, 360,000 THB
- "Process developments for high-aspect-ratio microelectromechanical systems (HARMS) using x-ray lithography at the siam photon laboratory",
funded by the Synchrotron Light Research Institute, December 1, 2005 - November 30, 2007, 2,021,250 THB (SUT overhead 63,750 THB)
- "Design and fabrication of capacitive humidity sensors using micro-electro-mechanical systems (MEMS) technology",
funded by the National Electronics and Computer Technology Center, February 23, 2004 - February 22, 2007, 1,320,000 THB (SUT overhead 105,454 THB)
- "Study of thai bank note identification methods: Implementation guideline of bank note identifier for the blind and visually impaired persons",
funded by the Suranaree University of Technology, Jan 23, 2003 - Jan 23, 2004, 50,000 THB
Contact
- Nimit Chomnawang, Ph.D.
School of Electrical Engineering Institute of Engineering Suranaree University of Technology Nakhon Ratchasima, Thailand 30000
- E-mail: sut.mems@gmail.com
- Phone: +66 81-877-9601
- Fax: +66 4422-4601
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