Welcome to the official web page of the international student group "µ-bes" (Microbes) in Microsystems Design Laboratory.
The Design Objecive was to build a reconfigurable set of components which can be used to build up any system. To meet this, mechanical parts such as supporting blocks, compliant hinges and optical device holders were designed to build a LEGO‐like‐system and manufactured out of a Silicon Wafer by means of Silicon ICP process. Using the FRDPARRC analysis, two designs were developed as variations of the same idea. The geometry of the parts were optimized to achieve minimal size, best assembly and maximum stability. With micro‐optics as an application focus, the parts were assembled to build an interferometer, although it can be assembled into other configurations as well. The system proved to function correctly, within a total span of 3.8 cm. Results are promising, for micro‐optical applications.
Last updated : 10.02.2009 |
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